Application of hollow cathode glow discharge in the processes of thing metal films deposition

dc.contributor.author	Болотов, М. Г.
dc.date.accessioned	2020-06-09T13:13:24Z
dc.date.available	2020-06-09T13:13:24Z
dc.date.issued	2020
dc.identifier.uri	http://ir.stu.cn.ua/123456789/19474
dc.description	Bolotov, M. G. Application of hollow cathode glow discharge in the processes of thing metal films deposition / M. G. Bolotov // Modern engineering research: topical problems, challenges and modernity : Collective monograph. - Riga : Izdevnieciba “Baltija Publishing”, 2020. – P. 1-21.	en_US
dc.language.iso	en	en_US
dc.publisher	Рига : Baltija Publishing	en_US
dc.title	Application of hollow cathode glow discharge in the processes of thing metal films deposition	en_US
dc.type	Book chapter	en_US